Fast Deposited Microcrystalline Silicon Solar Cells
نویسنده
چکیده
Microcrystalline silicon solar cells with AM 1.5 conversion efficiency above 5 % have been deposited at deposition rates in excess of 10 Å/s. This is achieved by VHF-GD at an excitation frequency of 130 MHz. By increasing the plasma power at a dilution ratio of 7.5 % silane/(silane+hydrogen) there first appears a morphological transition from a-Si:H to μc-Si:H and then an increase in deposition rate. Crystallographic properties and solar cell efficiencies vary thereby in a significant manner.
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